Cilic, a semifinalist here last year, will face unheralded Somdev Devvarman of India, who advanced to the final after No. 5 Rainer Schuettler of Germany withdrew with a wrist injury.
It will be the 23-year-old Devvarman's first ATP Tour final, after winning NCAA collegiate titles in 2006 and '07 at the University of Virginia.
Devvarman was a wild-card entry in the tournament and is the first Indian player to reach the final of the event, which began as the Indian Open in 1996 at New Delhi, and then moved to Chennai the following year.
Indian Davis Cup player Leander Paes was a semifinalist here in 1998.
Cilic used one break in the first set and three more in the third, while only losing serve once.
"It was my best match so far,'' said Cilic. "I'm hitting the ball well, feeling happy with way I'm playing.''
The Chennai Open was one of three events in which Cilic reached the semifinals last year. His lone title came in New Haven, Connecticut, after semifinal defeats here and in Nottingham, England.
"Tomorrow's final could be like playing an away Davis Cup match with the home crowd getting behind him,'' said Cilic.
Devvarman conceded that Cilic was in tremendous form.
"I saw Marin play today, he was simply awesome,'' he said. "Tomorrow's my first chance to win a title. It's disappointing to come through to the final in this manner, but I look forward to my first final.''
Schuettler, a 32-year-old veteran, said he experienced strong pain in his left wrist following Friday's win over fellow German Bjorn Phau.
"As I warmed up for the semifinal, I wasn't able to hit a double-handed backhand,'' Schuettler said. "I had the same (injury) a few years go, but it wasn't as bad as now. It's a very disappointing moment. I will now fly to Melbourne and see if I can be ready in time for the Australian Open.''
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Cilic, Schuettler advance in Chennai Open
Cilic, Schuettler reach semifinals of Chennai Open
