The second-seeded Ferrer was serving for the match at 5-3 in the deciding set when Querrey broke, and the big-serving American went on to win the tiebreaker.
The 21-year-old American will be seeking his second ATP Tour title on Saturday when he plays top-seeded Juan Martin Del Potro of Argentina, who beat third-seeded Robin Soderling of Sweden 6-4, 6-3.
Querrey won his first tour event at Las Vegas last year.
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